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Clean Robot Product List

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Direct Drive Double Arm Clean Robot 'HR81315-1900'

Direct Drive Double Arm Clean Robot 'HR81315-1900'

High rigidity design enables high-speed transport of glass substrates! ISO Class 2 clean robot.

The "HR81315-1900" is a linear double-arm clean robot equipped with an all-axis ABS encoder AC servo motor. It transports glass substrates at high speed due to its high rigidity design. It holds the glass substrates by attaching anti-slip pads to the top surface of the CFRP fork. Additionally, it features a CFRP fork that is heat-resistant up to 250°C. 【Features】 ■ Equipped with various sensors ■ All-axis ABS encoder AC servo motor specification ■ Dedicated command control via RS232C ■ Substrate holding: Glass substrates are held by attaching anti-slip pads to the top surface of the CFRP fork ■ Fork: 250°C heat-resistant CFRP fork *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots
  • Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot SSCR3115S Series

3-Axis Cylindrical Coordinate Clean Robot SSCR3115S Series

Suitable for small wafer transport, allowing for a compact device layout.

The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series

3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot SCR3100S-PM Series

3-Axis Cylindrical Coordinate Clean Robot SCR3100S-PM Series

By reducing the footprint, the equipment layout can be downsized.

The Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S series is suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, thanks to its reduced footprint, allowing for a more compact equipment layout. You can choose between base type and flange type according to your equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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2-Axis Cylindrical Coordinate Clean Robot SSCR2090S Series

2-Axis Cylindrical Coordinate Clean Robot SSCR2090S Series

It features an energy-saving design using a full-axis stepping motor.

The SSCR2090S series of super clean room two-axis cylindrical coordinate clean robots is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. Each axis retains the specifications of higher-end models, including encoders, latch-type solenoid valves, and pressure switches with digital displays. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot SHR3000 Series

3-Axis Cylindrical Coordinate Clean Robot SHR3000 Series

It is possible to choose between base type and flange type according to the device layout.

The SHR3000 series of 3-axis cylindrical coordinate robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout. The S-curve acceleration and deceleration control allows for high-speed and high-precision transport of wafers. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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4-axis horizontal multi-joint clean robot GCR4000-PM series

4-axis horizontal multi-joint clean robot GCR4000-PM series

Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.

The GCR4000-PM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. It is possible to choose between base type and flange type according to the equipment layout. It can be equipped with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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Clean Robot "SCR3100S-PM Series"

Clean Robot "SCR3100S-PM Series"

A clean robot that allows for miniaturization of device layout!

The "SCR3100S-PM series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. Its small footprint makes it suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 - Arm variation: 100mm - Z-axis variation: 200mm and 300mm - Load capacity: 0.5kgf or less at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts
  • Clean Robot

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Clean Robot 'SSCR3115S Series'

Clean Robot 'SSCR3115S Series'

A clean robot that achieves a small footprint and lightweight design!

The "SSCR3115S series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It allows for a compact device layout. Additionally, due to its small footprint and lightweight design, it is ideal for transporting small wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Maximum load capacity is 0.2 kgf or less at the third joint of the arm (work only) - Equipped with a motion monitor - Control methods include RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts
  • Clean Robot

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Clean Robot "SCR3000CS Series"

Clean Robot "SCR3000CS Series"

A clean robot that is optimal for wafer transport in semiconductor manufacturing equipment, such as inspection devices!

The "SCR3000CS Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is suitable for wafer transport within semiconductor equipment and inspection devices, and can accommodate optimal chucks tailored to the transported items and equipment layout. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations: 100mm, 130mm, 160mm, 200mm - Z-axis variations: selectable from 200mm onwards - Maximum load capacity: 3kgf or less based on the third joint of the arm - Equipped with operation monitoring - Control methods: RS232C and parallel photo I/O *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts
  • Clean Robot

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Cylindrical Coordinate Clean Robot "PHT-R-4"

Cylindrical Coordinate Clean Robot "PHT-R-4"

Supports atmospheric transport of wafers! The main unit weighs approximately 47 kg and the controller weighs about 8 kg.

The "PHT-R-4" is a horizontal multi-joint wafer transport robot designed for use in clean rooms. It is capable of moving in the front and back (X-axis), rotating (θ-axis), moving up and down (Z-axis), and hand rotation (0 to 180 degrees), making it suitable for transporting wafers in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes. 【Product Overview (Excerpt)】 ■ Installation Environment: Inside clean rooms (ambient temperature 10 to 35 degrees, humidity below 70% RH) ■ Arm: Single arm (Material: Aluminum, CFRP, Ceramic) ■ Load Capacity: 3 kg (total weight of hand base, hand, and work) *For more details, please refer to the PDF document or feel free to contact us.

  • Company：PHT
  • Price：Other
  • Transport and handling robots
  • Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

It offers superior cost performance compared to conventional MHR.

The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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4-axis cylindrical coordinate clean robot MTCR4000 series

4-axis cylindrical coordinate clean robot MTCR4000 series

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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4-axis horizontal multi-joint clean robot GCR4000-AM series

4-axis horizontal multi-joint clean robot GCR4000-AM series

Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.

The GCR4000-AM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300mm. You can choose between base type and flange type according to the equipment layout. It is possible to use optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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5-axis vacuum horizontal multi-joint clean robot GTVHR5000 series

5-axis vacuum horizontal multi-joint clean robot GTVHR5000 series

It is possible to reduce processing costs by simplifying the shape of chamfer processing.

The 5-axis vacuum horizontal multi-joint clean robot GTVHR5000 series can accommodate a variety of device layouts. It contributes to the reduction of footprint and vacuum chamber volume, enabling cost reduction in processing through simplified chamber shapes. It allows access to parallel stages, making it ideal for inline layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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Clean Robot "SHR3000 Series"

Clean Robot "SHR3000 Series"

Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!

The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts
  • Clean Robot

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Clean Robot 'SSCR2090S Series'

Clean Robot 'SSCR2090S Series'

Clean robot for small wafer paths!

The "SSCR2090S Series" is a two-axis cylindrical coordinate clean robot designed for super clean rooms. With its compact footprint and lightweight design, it is suitable for small wafer transport within semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Load capacity is 0.1 kgf or less (work only) when converted to the third joint of the arm - Equipped with operation monitoring - Control method is RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts
  • Clean Robot

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4-axis cylindrical coordinate clean robot STHR4000 series

4-axis cylindrical coordinate clean robot STHR4000 series

It is suitable for wafer transport and allows for quick wafer exchange.

The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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4-axis horizontal multi-joint clean robot GCR4280-AM series

4-axis horizontal multi-joint clean robot GCR4280-AM series

Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.

The multi-axis type for super clean rooms, the 4-axis horizontal articulated clean robot GCR4280-AM series, is suitable for transporting wafers, small glass substrates, and other items within semiconductor manufacturing equipment and inspection devices, compatible with 300mm and 450mm sizes. You can choose between base type and flange type according to the equipment layout. It is possible to accommodate optimal chucks tailored to the items being transported and the equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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Clean Robot "STHR4000 Series"

Clean Robot "STHR4000 Series"

A twin-arm robot optimal for wafer transport in semiconductor manufacturing equipment!

The "STHR4000 Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. Equipped with two arms, it enables quick wafer exchanges and is primarily suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations available in two sizes: 95mm and 156mm - Z-axis variations available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Adoption of twin arms reduces wafer exchange time - Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts
  • Clean Robot

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Clean Robot "STCR4000S Series"

Clean Robot "STCR4000S Series"

A clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices!

The "STCR4000S Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. With its two arms, it enables quick wafer exchanges. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 ■ Arm variations can be selected from 100mm and above ■ Z-axis variations can be selected from 200mm and above ■ Load capacity is 3kgf or less based on the third joint of the arm ■ Adoption of twin arms reduces wafer exchange time ■ Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.

  • Inspection robot
  • Clean Robot

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4-axis cylindrical coordinate clean robot STCR4000S series

4-axis cylindrical coordinate clean robot STCR4000S series

The exchange of wafers can be done in a short time with two arms.

The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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4-axis cylindrical coordinate clean robot LTHR4000 series

4-axis cylindrical coordinate clean robot LTHR4000 series

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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5-axis horizontal multi-joint clean robot GTCR5000-AM series

5-axis horizontal multi-joint clean robot GTCR5000-AM series

While it is a single arm, it maintains the functionality of a twin arm.

The GTCR5000 series is a 5-axis horizontal multi-joint clean robot compatible with 300mm, which ensures the functionality of a twin arm while being a single arm by incorporating a twin chuck. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. Depending on the equipment layout, you can choose between a base type and a flange type. It is possible to accommodate with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

It can be used for transporting wafers inside a vacuum chamber.

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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Vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series

Vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series

Compared to STVHR, the portable weight has doubled, resulting in excellent cost performance.

The vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series can be used for transporting wafers within a vacuum chamber. Compared to the STVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the STVHR for installation, allowing for a smooth transition during replacement. The adoption of a twin-arm design has reduced wafer exchange time. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Clean Robot

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